포토리소(Photolithography)
가공방법 및 적용분야에 대해서
2345
2.1 Silicon with Oxide Layer
6
Coater 제조회사
-TEL(83%)
-Dainippon(8%)
-ASML(4%)
KCTEC
Spinless Coater
PR사용량 1/10
2.1 Silicon with Oxide Layer - Coater
7
2.2 Expose Photoresist
8
Fig. 5 Scaner
Hankook Industry co., LTD
2.2 Expose Photoresist - Scaner
9
2.3 Develop Photoresist
10
2.3 Develop Photoresist - Stepper
.... |
2012.06.04
17페이지
