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FEDERAL STANDARD 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones

Revised 1992 by the Institute of Environmental Sciences 940 E. Northwest Highway Mount Prospect, Illinois 60056 (708) 255-1561• Fax (708) 255-1699

Approved by the U.S. General Services Administration

[METRIC) FED-STD-209E September 11, 1992 SUPERSEDING FED-STD-209D June 15, 1988

FEDERAL STANDARD AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES

This Standard is approved by the Commissioner, Federal Supply Service, General Services Administration, for the use of all Federal agencies.

DISTRIBUTION STATEMENT A: Approved for public release; distribution is unlimited.

FSC 3694

FED-STD-209E September 11, 1992

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